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Research Opportunities for Materials with Ultrafine Microstructures (1989) / Chapter Skim
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Pages 42-42

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... Use of reactive gas phase etching in conjunction with microlithography can create extremely high-surface-area materials for catalytic applications. Electrodeposition Artificially layered materials can also be made in a single electroplating bath by modulating either the cathodic current or potential.
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  • gas phase


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