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Database Needs for Modeling and Simulation of Plasma Processing (1996) / Chapter Skim
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Pages 11-11

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From page 11...
... It should be noted that, in addition to the recommended high-priority chemical systems listed in Table 1.2, there are many other chemical systems that are of interest in various applications of plasma processing in integrated circuit manufacture. These include physical vapor deposition techniques such as sputtering and reactive sputtering; conventional metal etching (Al/Cu alloys)
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Key Terms

  • plasma processing
  • plasma process
  • plasma processes
  • chemical species
  • gate electrode

  • plasma modeling
  • plasma etching
  • applications include
  • integrated circuit
  • plasma model

  • chemical vapor
  • vapor deposition


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