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Database Needs for Modeling and Simulation of Plasma Processing (1996) / Chapter Skim
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Pages 13-14

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From page 13...
... TOOL SCALE MODELS Over the past decade, modeling and simulation of plasma reactors at the tool scale, meaning the scale of the entire reactor (including the entire wafer) , have attracted much attention.
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From page 14...
... ~ . The major missing ingredient in further exploitation of large-scale plasma modeling and simulation is the availability of a physical and chemical database for a large and diverse set of species present In the discharge, interacting through a variety of collisional processes in the gas phase aIld at surfaces.
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Key Terms

  • scale models
  • gas phase
  • plasma process
  • tool scale
  • plasma processes

  • process control
  • plasma tools
  • plasma tool
  • scale model
  • electric fields

  • neutral species
  • plasma modeling
  • chemical reactions
  • plasma models
  • positive ions

  • neutral transport
  • plasma model
  • rigorous treatment
  • negative ion
  • glow discharge

  • phase chemistry
  • negative ions
  • surface chemistry
  • process objectives
  • plasma reactor

  • collisional processes
  • industrially relevant


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