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Database Needs for Modeling and Simulation of Plasma Processing (1996) / Chapter Skim
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Pages 15-15

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From page 15...
... In addition, they must be set up in such a way that they can be coupled conveniently to the feature scale models, discussed below. Barriers to Using Too!
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Key Terms

  • scale models
  • feature scale
  • scale model
  • plasma models
  • scale simulations

  • various processes
  • plasma model
  • discharge plasmas
  • processes occurring
  • glow discharge

  • length scales
  • gas flow


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