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Database Needs for Modeling and Simulation of Plasma Processing (1996) / Chapter Skim
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Pages 17-20

The Chapter Skim interface presents what we've algorithmically identified as the most significant single chunk of text within every page in the chapter.
Select key terms on the right to highlight them within pages of the chapter.


From page 17...
... For too] scale models, the treatments of neutral gas mass transfer, fluid flow, and heat transfer, while complicated by relatively low pressures and associated problems with transition-regime and sometimes free molecular flow, are well developed fields.
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From page 18...
... 18 DA TABASE NEEDS FOR MODELING AND SIMULA TION OF PLASMA PROCESSING include a great deal of chemical complexity to three-dimensional, t~me-dependent models with minimal chemistry that aim to capture only physical phenomena like gas flow or heat transfer. Models that include chemistry make assumptions about which of the chemical species (several tens, probably, for common industrial chemistries)
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From page 19...
... , there wait be many and various positive and negative ions formed from neutral species. Collision cross sections between the neutral species and electrons must be obtained.
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From page 20...
... Estimates of electron-neutral and ion-neutral collision cross sections, coupled with preliminary values for kinetic rate coefficients for gas phase and surface reactions, would be included in the model. The mode!
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Key Terms

  • cross sections
  • rate coefficients
  • scale models
  • plasma processing
  • gas phase

  • excited states
  • plasma process
  • diode laser
  • plasma processes
  • chemical species

  • feature scale
  • plasma tool
  • cross section
  • chemical complexity
  • polymeric film

  • scale model
  • surface reactions
  • neutral species
  • chemical reactions
  • reaction rate

  • plasma etching
  • internal energy
  • excited state
  • phase species
  • silicon dioxide

  • collision cross
  • energetic ion
  • plasma model
  • heat transfer
  • discharge plasmas


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