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Database Needs for Modeling and Simulation of Plasma Processing (1996) / Chapter Skim
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Pages 21-22

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... Only a handful of studies have been made that attempt to validate models of plasma processes with industrially relevant chemistries. Models that attempt to link the relevant length scales (from too]
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Key Terms

  • plasma processing
  • plasma process
  • plasma processes
  • chemical species
  • feature scale

  • plasma models
  • plasma model
  • processes occurring
  • length scales
  • fundamental data

  • industrially relevant
  • key species
  • key chemical


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