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Database Needs for Modeling and Simulation of Plasma Processing (1996) / Chapter Skim
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Pages 23-23

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From page 23...
... can be related to translational and rotational energies or temperatures. TABLE 3.1 Optical Diagnostic Techniques for Plasma Processing Systems Gas Phase Surface Infrared absorption Ultraviolet/visible absorption Electronic emission Actinometry Laser-induced fluorescence Multiphoton ionization Optogalvanic spectroscopy Reman scattering Stimulated Raman scattering Stimulated emission Laser-induced photofragment emission Third harmonic generation Particle scattering Reflection/ab sorption Multiple internal reflection ~ · .
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Key Terms

  • cross sections
  • plasma processing
  • gas phase
  • plasma process
  • review articles

  • chemical species
  • spectral features
  • dissociative ionization
  • diagnostic techniques
  • cross section

  • internal energy
  • absolute concentrations
  • spectroscopic techniques
  • infrared absorption
  • multiple internal

  • optical techniques
  • phase species
  • ion processes
  • internal reflection
  • molecular species

  • near threshold
  • mass spectrometry
  • key species
  • key chemical
  • energy near

  • proper understanding


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