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Database Needs for Modeling and Simulation of Plasma Processing (1996) / Chapter Skim
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Pages 26-26

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From page 26...
... Modulated plasma experiments can be used also to determine the gas phase kinetics, the negative ion formation rates, and the formation of clusters. At lower pressures, surface recombination and reaction often dominate the losses, and coefficients can be extracted from the species decay constants and t~me-dependent profiles adjacent to the surface.
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Key Terms

  • gas phase
  • surface reactions
  • reaction rate
  • profiles adjacent
  • species concentration

  • species decay
  • surface reaction
  • negative ion
  • ion formation
  • phase kinetics

  • modulated plasma


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