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Database Needs for Modeling and Simulation of Plasma Processing (1996) / Chapter Skim
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Pages 28-28

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From page 28...
... A recent technique that might be applied on-line is surface Resorption spectrometry, where the spectrometry may be mass spectrometry or laser-~nduced fluorescence spectrometry. The former technique has been used with reflected molecular beams to characterize surface reactions at different surface temperatures and materials in molecular beam epitaxy; recently the output of the mass spectrometer has been applied in the control loop replacing the signal from the oven temperature.
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Key Terms

  • gas phase
  • molecular parameters
  • path length
  • diagnostic experiments
  • spectral features

  • diagnostic techniques
  • surface reactions
  • plasma etching
  • collection efficiency
  • fluorescence collection

  • molecular beam
  • species concentration
  • multiple internal
  • temperature measurements
  • surface reaction

  • atomic force
  • internal reflection
  • mass spectrometry
  • plasma reactor
  • spectroscopic diagnostic

  • surface temperature
  • processing plasmas
  • beam techniques
  • former technique
  • surface atom

  • surface temperatures
  • atom coverage


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