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Database Needs for Modeling and Simulation of Plasma Processing (1996) / Chapter Skim
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Pages 3-3

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From page 3...
... 2. The major potential benefits of plasma modeling to plasma equipment suppliers include more rapid and efficient development of new tools that meet increasingly stringent process requirements, optimization of designs before fabrication of prototype tools, and development of robust, real-time process control schemes for their tools.
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Key Terms

  • neutral chemistry
  • plasma equipment
  • plasma process
  • plasma processes
  • process control

  • chemical species
  • equipment suppliers
  • gate electrode
  • chemical complexity
  • plasma modeling

  • plasma models
  • integrated circuit
  • neutral transport
  • plasma model
  • ion processes

  • processes occurring
  • fundamental data
  • equipment supplier
  • silicon etching
  • key species

  • key chemical
  • surface processes


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