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Database Needs for Modeling and Simulation of Plasma Processing (1996) / Chapter Skim
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Pages 33-33

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From page 33...
... This chapter presents an introduction to the key issues and the current level of understanding of plasma-surface interactions. Several techniques, experimental and computational, are suggested as most promising in order to advance the state of the database and to improve treatments of plasma-surface interactions in tool scale and feature scale models.
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Key Terms

  • scale models
  • plasma processing
  • plasma process
  • tool scale
  • feature scale

  • incident species
  • scale model
  • internal energy
  • silicon dioxide
  • reaction layer

  • ion processes
  • diffusion effects
  • specific surfaces
  • surface processes


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