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Database Needs for Modeling and Simulation of Plasma Processing (1996) / Chapter Skim
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Pages 35-35

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From page 35...
... Mass spectrometry, threshold ionization mass spectrometry, and Fourier transform infrared spectroscopy are other important tools for plasma sampling that are very help fill for incident flux analysis. The products and product energy distributions for many of the systems of current interest, e.g.
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Key Terms

  • gas phase
  • ion bombardment
  • infrared spectroscopy
  • molecular beam
  • mass spectrometry

  • desorbing species
  • dye laser
  • specific surfaces
  • incident flux
  • reflected species


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