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Database Needs for Modeling and Simulation of Plasma Processing (1996) / Chapter Skim
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Pages 36-36

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From page 36...
... Ultrahigh-Vacuum Approach Using Mass and Energy Selected Reactive Beams Winters and Coburn, and the FOM group, did excellent work using this approach by employing inert gas ion bombardment and chemical etchants like XeF2 and CI2. In the future, the major emphasis should be on the ionic and neutral species that typically interact with surfaces under realistic plasma processing conditions.
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Key Terms

  • rate coefficients
  • plasma processing
  • plasma process
  • chemical species
  • surface reactions

  • ion bombardment
  • neutral species
  • reaction rate
  • temperature dependence
  • surface reaction

  • ion processes
  • surface chemistry
  • apparatus using
  • relevant energies
  • reaction pathways


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