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Database Needs for Modeling and Simulation of Plasma Processing (1996) / Chapter Skim
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Pages 38-38

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From page 38...
... . In principle, combinations ofthese techniques could be used together with surface diagnostic experiments to shed light on surface reaction pathways and rates.
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Key Terms

  • diagnostic experiments
  • plasma etching
  • angular dependence
  • surface reaction
  • molecular dynamics

  • processes occurring
  • reaction pathways
  • monte carlo
  • etching rates
  • surface processes


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