Skip to main content

Currently Skimming:


Pages 42-42

The Chapter Skim interface presents what we've algorithmically identified as the most significant single chunk of text within every page in the chapter.
Select key terms on the right to highlight them within pages of the chapter.


From page 42...
... Several molecules relevant to plasma processing have been studied, providing dissociation cross sections for CF4, SF6, NF3, BC13,4 and several Neons and halogenated methane compounds. Using traditional beam techniques to measure cross sections for electron-~mpact dissociation of molecules into neutral products is extremely difficult, especially when the dissociation fragments are in the ground state or do not radiate.


This material may be derived from roughly machine-read images, and so is provided only to facilitate research.
More information on Chapter Skim is available.