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Database Needs for Modeling and Simulation of Plasma Processing (1996) / Chapter Skim
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Pages 44-44

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From page 44...
... There are numerous compendia of momentum transfer cross sections derived in this fashion.~° This approach has also been used successfidly to generate fairly complete collision cross section data sets for several atomic and molecular species. However, except for a few cases such as SF6, it has generally been difficult to distinguish dissociation processes from other types of molecular excitation processes.
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Key Terms

  • cross sections
  • ionization cross
  • neutral chemistry
  • dissociative attachment
  • dissociative ionization

  • cross section
  • attachment cross
  • excitation cross
  • collision cross
  • vibrational excitation

  • section measurements
  • total ionization
  • transfer cross
  • ion processes
  • negative ion

  • molecular species
  • momentum transfer
  • vibrationally excited
  • target species
  • sections derived

  • dissociation fragments
  • monte carlo
  • excited molecules
  • processing plasmas
  • ion formation

  • section data


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