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Database Needs for Modeling and Simulation of Plasma Processing (1996) / Chapter Skim
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Pages 47-47

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From page 47...
... The availability of neutral chemistry cross sections and rate coefficients varies greatly depending on the specific reaction chemistry being used. Depending on the specific chemistry, rate coefficients may be available from the literature on combustion, upper atmospheric chemistry, or chemical vapor deposition (CVD)
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Key Terms

  • cross sections
  • rate coefficients
  • plasma processing
  • activation energy
  • excited states

  • neutral chemistry
  • plasma process
  • atmospheric chemistry
  • typically operate
  • hot atoms

  • bulk plasma
  • branching ratios
  • upper atmospheric
  • charge exchange
  • cross section

  • neutral species
  • plasma etching
  • internal energy
  • excited state
  • random thermal

  • plasma densities
  • ion energies
  • etching reactors
  • power deposition
  • energetic ion

  • chemical vapor
  • vapor deposition
  • ion processes
  • energetic ions
  • electronically excited


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