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Database Needs for Modeling and Simulation of Plasma Processing (1996) / Chapter Skim
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Pages 48-49

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From page 48...
... Cross sections for collisional processes in the higher energy range are measured by beam techniques, and usually characterized by a directed energy. TABLE 6.1 Categorization of Data Needs for Ion Processes Process ThermalSuperthermal (e
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From page 49...
... . Bohme has measured and assembled a database for ion-molecule reactions for silicon-beanng ions.7 Mandich and Teentsy have performed measurements of ion-molecule cross sections in silane systems using Fourier transform mass spectrometry, SinHm+ + SiH4 ~ Products .
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Key Terms

  • cross sections
  • rate coefficients
  • plasma processing
  • plasma process
  • association reactions

  • exchange reactions
  • energy range
  • bulk plasma
  • charge exchange
  • cross section

  • internal energy
  • scaling laws
  • ion energies
  • processing reactors
  • ion association

  • temperature dependence
  • ion processes
  • momentum transfer
  • mass spectrometry
  • collisional processes

  • beam techniques


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