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Database Needs for Modeling and Simulation of Plasma Processing (1996) / Chapter Skim
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Pages 51-51

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From page 51...
... Recent compendia and reviews of cross sections and rate coefficients can be found in Mitchelli3 and Adams.~4 The temperature dependencies ofthese processes are also important. [on-Neutral and Neutral-Neutral Excitation Inelastic collisions between ions and neutral species that result in excitation, dissociation, or ionization ofthe neutral target without transfer of charge are classified as ion-neutral excitation collisions.
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Key Terms

  • cross sections
  • rate coefficients
  • plasma processing
  • neutral chemistry
  • plasma process

  • hot atoms
  • energy range
  • cross section
  • neutral species
  • plasma densities

  • total rate
  • energetic ion
  • chemistry databases
  • plasma density


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