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Database Needs for Modeling and Simulation of Plasma Processing (1996) / Chapter Skim
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Pages 52-52

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From page 52...
... Therefore gas phase chemical reactions that have significant activation energy barriers are not important. Plasma processing systems with high gas temperatures typically operate at low gas pressures, where the rates of gas phase chemical reactions are small compared to wall-activated chemistry.
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Key Terms

  • cross sections
  • rate coefficients
  • plasma processing
  • operating conditions
  • gas phase

  • activation energy
  • plasma process
  • atmospheric chemistry
  • typically operate
  • energy barriers

  • association reactions
  • transition state
  • gas pressure
  • cross section
  • chemical reactions

  • internal energy
  • phase chemical
  • plasma densities
  • gas temperatures
  • power deposition

  • low pressure


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