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Database Needs for Modeling and Simulation of Plasma Processing (1996) / Chapter Skim
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Pages 54-54

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From page 54...
... Tn the 1980s and 1990s, interest ~n PECVD of a-Si:H and its alloys for photovoltaics has supplemented that database with reactions ~nvolving SiEl4, Si2H6, CH4, C2H6, and GeEt.27 In many cases, these rate coefficients and cross sections are for quenching of the excited state on a particular gas, and little information is given on the identity and branching ratios of the products. Summary It is clear that a large resource for cross sections and rate coefficients is currently available in the literature.
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Key Terms

  • cross sections
  • rate coefficients
  • plasma processing
  • excited states
  • plasma process

  • atmospheric chemistry
  • branching ratios
  • cross section
  • excited state
  • initially compiled

  • low pressure


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