Database Needs for Modeling and Simulation of Plasma Processing (1996) / Chapter Skim
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Pages 55-56
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In all cases, the choice of the systems of interest must be aligned with the current planning of the semiconductor industry, as indicated in the Semiconductor Industry Association's roadmap.28 Ion Processes The ion-molecule database is fragmentary for most of the chemistries of interest. The majority of ionmolecule reaction rate coefficients that are now available were not produced specifically for the semiconductor manufacturing industry, but rather for upper atmospheric chemistry, high-energy radiation chemistry, and gas-discharge or e-beam excited lasers.
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From page 56... ...
These databases do not include many of the more reactive gas-phase species of interest for plasma processing. One of the best known sources of thermochemical data, the JANAF Thermochemical Tables,30 provides data on molecular geometries, vibrational frequencies, heat capacities, entropies, enthalpies, and equilibrium constants.
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