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Appendix B: Workshop Agenda
Pages 61-62

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From page 61...
... Economou, University of Houston 1345 Development of Design Onented Simulation Tools Anantha Krishnan, CFD Research for Me Microelectronic Industry Corporation B Feature Scale Simulation 1415 Low Pressure Transport and Reaction in Features 1445 Feature Scale Simulation and Model Charactenzation 15 15 Break Session m Discussion 1530 Breakout Sessions Industrial Perspectives Too!
From page 62...
... Kushner, Cochairs 0900 Database Needs: Electron Impact Processes 0930 Rate Constants of Heterogeneous Processes in Plasma-Assisted Processing 1000 Status of Ion and Neutral Chemistry Databases 1030 1045 1115 1145 1215 Break Thermodynamic and Excited State Data for Plasma Processing Data Needs for Radiative Processes and Diagnostics Critical Evaluation and Dissemination of Plasma Databases Lunch Session V: Discussion 1315 Breakout Sessions Electron Impact Processes Heterogeneous Processes Ton Trnp act Processes and Neutral Chemistry Thermochemistry of Reactive Species Radiative Processes and Diagnostics 1445 Break 1500 Reports on Breakout Sessions 1500 Electron Impact Processes 1520 Heterogeneous Processes 1540 Ton hop act Processes and Neutral Chemistry 1600 Thermochemistry of Reactive Species 1620 Radiative Processes and Diagnostics 1640 Summary Discussion 1800 Adjourn Jean W Gallagher, National Institute of Standards and Technology Gottlieb S


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