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Database Needs for Modeling and Simulation of Plasma Processing (1996) / Chapter Skim
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Pages 8-8

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From page 8...
... in the rest of this chapter the panel outlines the opportunities that modeling and simulation offer to chip manufacturers and to plasma equipment suppliers to meet these goals. PLASMA EQUIPMENT SUPPLIER PERSPECTIVES Equipment suppliers design plasma process chambers, with the associated pumping, gas handling, wafer handing, and control software and hardware.
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Key Terms

  • operating conditions
  • plasma equipment
  • plasma process
  • process control
  • plasma tools

  • equipment suppliers
  • tool design
  • process chemistries
  • plasma tool
  • process equipment

  • mass flow
  • chip manufacturer
  • virtual prototyping
  • gas flow
  • chip manufacturers

  • process design
  • equipment supplier


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