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Database Needs for Modeling and Simulation of Plasma Processing (1996) / Chapter Skim
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Pages 9-10

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From page 9...
... CHIP MANUFACTURER PERSPECTIVES The semiconductor industry has established Me necessity of plasma processing for both deposition and etching of materials. These applications include highly an~sotropic etching of deep trenches in silicon, highly selective etching of polysilicon gates on very Win gate oxides, and blanket photoresist removal.
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From page 10...
... Particles become charged in the plasma and are often trapped above the wafer. An important opportunity exists for plasma modeling and simulation to contribute to better understanding and eventual control of particles in plasma process equipment.
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Key Terms

  • plasma processing
  • gas phase
  • plasma equipment
  • plasma process
  • tool scale

  • plasma processes
  • process control
  • gate oxide
  • plasma modeling
  • process equipment

  • semiconductor industry
  • silicon dioxide
  • chip manufacturer
  • chemical models
  • applications include

  • plasma model
  • processes occurring
  • surface chemistry
  • length scales
  • electromagnetic phenomena

  • chip manufacturers


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