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Database Needs for Modeling and Simulation of Plasma Processing (1996) / Chapter Skim
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... Given the reality of inevitably limited resources, and the often considerable investments that must be made to measure and/or compute collision cross sections, reaction rate coefficients for gas phase reactions and surface chemical rates at surfaces exposed to plasma, some priorities must be established. These priorities are discussed below, and the report's recommendations on priorities constitute one of the main results of the study.
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Key Terms

  • cross sections
  • rate coefficients
  • plasma processing
  • gas phase
  • plasma equipment

  • plasma process
  • plasma processes
  • process control
  • equipment suppliers
  • cross section

  • scale model
  • reaction rate
  • semiconductor industry
  • collision cross
  • chip manufacturer

  • integrated circuit
  • semiconductor manufacturing
  • manufacturing industry
  • fabrication facility
  • length scales

  • plasma reactor
  • chip manufacturers
  • process design
  • equipment supplier
  • processing equipment

  • surface processes


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