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Frontiers of Engineering Reports on Leading Edge Engineering from the 1996 NAE Symposium on Frontiers of Engineering (1997) / Chapter Skim
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Fabrication Technology and the Challenges of Large-Scale Production
Pages 57-62

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From page 57...
... One of the many benefits MEMS technology derives from its common base with the IC industry is the methodology behind its fabrication sequences. Most MEMS processes can be decomposed into a repeating series of material deposition, patterning, and subsequent removal of specific areas of the material.
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From page 58...
... 58 r, no r i, :~ ~ ~8 HE Fetal ° .
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From page 59...
... Once they are patterned lithographically, these thick layers must undergo robust etch processes that have the capability to etch through the layers selectively and anisotropically while still maintaining critical line size dimensions and edge profiles. PARAMETRIC TESTING A production IC process is monitored by a regular, well-characterized set of parametric test structures.
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From page 60...
... Additionally, with the exception of such notables as the Analog Devices ADXL-50 and the Texas Instruments Digital Light Processors (DLP) , most MEMS devices produced today have little if any electronics integrally processed with the mechanical devices.
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From page 61...
... The extremely large wafer sizes and cutting-edge lithography processes that are the norm in the IC industry currently are not required for MEMS, which allows MEMS fabricators to capitalize their facilities at a fraction of the cost of the newest IC fates by using "last-year's" refurbished equipment. The down side to this is the limited influence that the MEMS technologists have on the semiconductor processing equipment manufacturers in urging them to develop innovative manufacturing solutions.
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From page 62...
... MEMS technology has received a considerable leg up from the manufacturing equipment, testing, and process engineering technology base established by the domestic IC industry. But unless the key differences and challenges that drive MEMS are adequately addressed and supported through both innovation and manufacturing resources, MEMS will be relegated to a position of "niche market item" rather than the enabling, revolutionary technology toward which it is evolving.
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Key Terms

  • mems devices
  • mechanical nature
  • equipment manufacturers
  • parametric test
  • technology base

  • functional testing
  • surface micromachined
  • surface micromachining
  • manufacturing infrastructure
  • analog devices

  • manufacturing technology
  • test structures
  • mems processes
  • electronics integrally
  • circuit manufacturing

  • technology derives
  • instruments digital
  • bulk devices
  • critical mems
  • operation transcends

  • optical signal
  • manufacturing equipment
  • layers selectively
  • active mechanical
  • benefited greatly

  • output nodes
  • successes demanding
  • manufacturing solutions
  • process engineer
  • size dimensions


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