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Database Needs for Modeling and Simulation of Plasma Processing (1996) / Chapter Skim
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Pages 29-32

The Chapter Skim interface presents what we've algorithmically identified as the most significant single chunk of text within every page in the chapter.
Select key terms on the right to highlight them within pages of the chapter.


From page 29...
... 6 J.W. Gallagher, National Institute of Standards and TechnologyAtomic and Molecular Physics Database 48, NIST Spectroscopic Properties of Diatomic Molecules Database, available from Standard Reference Data, NIST, Bldg.
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From page 30...
... S.E. Stein, National Institute of Standards and Technolo~ Atomic and Molecular Physics Database 35, NIST/EPA Gas Phase Infrared Database, available from Standard Reference Data, NIST, Bldg.
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From page 31...
... Sakai, and T Goto, "Measurements of the CF3 Radical Using Infrared Diode Laser Absorption Spectroscopy," J
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Key Terms

  • plasma processing
  • gas phase
  • infrared diode
  • infrared spectra
  • molecular physics

  • physics database
  • standard reference
  • reference data
  • plasma process
  • laser spectroscopy

  • van nostrand
  • diode laser
  • academic press
  • transient molecules
  • pure appl

  • diatomic molecules
  • polyatomic molecules
  • diagnostic techniques
  • infrared spectroscopy
  • plasma etching

  • collision broadening
  • surface infrared
  • reflection absorption
  • broadening parameters
  • using infrared

  • nist spectroscopic
  • resolution infrared
  • park ridge
  • spectroscopic techniques
  • infrared band


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